TY - CONF AU - Michael Gaitan AU - A. Parameswaran AU - Mona Zaghloul AU - Janet Cassard AU - Donald Novotny AU - John Suehle C2 - Proc., 35th Midwest Symposium on Circuits and Systems, Washington, DC, USA DA - 1992-12-31 00:12:00 LA - en PB - Proc., 35th Midwest Symposium on Circuits and Systems, Washington, DC, USA PY - 1992 TI - Design Methodology for Micromechanical Systems at Commercial CMOS Foundries Through MOSIS ER -