@conference{794561,
  author = {Michael Gaitan and A. Parameswaran and Mona Zaghloul and Janet Cassard and Donald Novotny and John Suehle},
  title = {Design Methodology for Micromechanical Systems at Commercial CMOS Foundries Through MOSIS},
  year = {1992},
  month = {1992-12-31 00:12:00},
  publisher = {Proc., 35th Midwest Symposium on Circuits and Systems, Washington, DC, USA},
  language = {en},
}