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Defect Formation in Semiconductor Layers During Epitaxial Growth
Published
Author(s)
B. Steiner, W. F. Tseng, J. Comas, U. Laor, R. G. Dobbyn
Citation
Journal of Crystal Growth
Volume
128
Pub Type
Journals
Citation
Steiner, B.
, Tseng, W.
, Comas, J.
, Laor, U.
and Dobbyn, R.
(1993),
Defect Formation in Semiconductor Layers During Epitaxial Growth, Journal of Crystal Growth
(Accessed December 2, 2023)