TY  - JOUR
AU  - B. Steiner
AU  - W. Tseng
AU  - J. Comas
AU  - U. Laor
AU  - R. Dobbyn
C2  - Journal of Crystal Growth
DA  - 1993-08-01 00:08:00
LA  - en
M1  - 128
PB  - Journal of Crystal Growth
PY  - 1993
TI  - Defect Formation in Semiconductor Layers During Epitaxial Growth
ER  -