@article{765906,
  author = {B. Steiner and W. Tseng and J. Comas and U. Laor and R. Dobbyn},
  title = {Defect Formation in Semiconductor Layers During Epitaxial Growth},
  year = {1993},
  number = {128},
  month = {1993-08-01 00:08:00},
  publisher = {Journal of Crystal Growth},
  language = {en},
}