An overview is given of current work projects of Technical Committee 201 on Surface Chemical Analysis of the International Organization for Standardization (ISO). ISTO/TC 201 has subcommittees for Auger electron spectroscopy (AES), secondary ion mass spectrometry, X-ray photoelectron spectroscopy (XPS), and glow discharge spectroscopy, and a working group for total reflection X-ray fluorescence spectroscopy. There are work projects for these analytical techniques and for sputter depth profiling, data management and treatment, specimen preparation, reference materials, and terminology. As an example of these projects, a description is given of a new procedure for the calibration of the binding-energy (BE) scales of XPS instruments that enables a laboratory to demonstrate that BE measurements have been made within user-specified tolerance limits. A similar procedure has been developed for the calibration of the kinetic-energy scales of AES instruments.
Proceedings Title: AIP Conference Proceedings
Conference Dates: June 26-29, 2000
Conference Location: Gaithersburg, MD
Conference Title: Characterization and Metrology for ULSI Technology 2000;
Pub Type: Conferences
binding-energy scale, calibration, International Organization for Standardi, standards, surface chemical analysis, X-ray photoelectron spectroscopy