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Crystalline Quality of Bonded Silicon-On-Insulator Characterized by Spectroscopic Ellipsometry and Raman Spectroscopy
Published
Author(s)
Nhan Van Nguyen, James E. Maslar, Junghyeun Kim, Jin-Ping Han, Jin-Won Park, Deane Chandler-Horowitz, Eric M. Vogel
Abstract
The crystalline quality of Silicon-On-Insulator fabricated by a wafer bonding technique was examined by spectroscopic ellipsometry and Raman spectroscopy. The detailed modeling of the experimental ellipsometric data yields information about structural defects in the Silicon-On-Insulator layer. The dielectric function of the Silicon-On-Insulator that best models the experimental ellipsometric data includes a physical mixture of crystalline silicon and about 4 to 7 % of amorphous silicon, suggesting a slight lack of long-range order of the silicon atoms in the Silicon-On-Insulator layer. The use of a dielectric function other than that of pure crystalline silicon is supported by Raman spectroscopic results that indicate the presence of structural defects in the Silicon-On-Insulator layer. These structural defects are attributed to the effects of hydrogen implantation.
Citation
Applied Physics Letters
Volume
85
Issue
14
Pub Type
Journals
Keywords
crystallinity, optical properties, Raman Spectroscopy, Silicon-On-Insulator, Spectroscopic Ellipsometry, Thin films
Citation
Nguyen, N.
, Maslar, J.
, Kim, J.
, Han, J.
, Park, J.
, Chandler-Horowitz, D.
and Vogel, E.
(2004),
Crystalline Quality of Bonded Silicon-On-Insulator Characterized by Spectroscopic Ellipsometry and Raman Spectroscopy, Applied Physics Letters
(Accessed October 11, 2025)