TY  - JOUR
AU  - Nhan Nguyen
AU  - James Maslar
AU  - Junghyeun Kim
AU  - Jin-Ping Han
AU  - Jin-Won Park
AU  - Deane Chandler-Horowitz
AU  - Eric Vogel
C2  - Applied Physics Letters
DA  - 2004-10-04 00:10:00
LA  - en
M1  - 85
PB  - Applied Physics Letters
PY  - 2004
TI  - Crystalline Quality of Bonded Silicon-On-Insulator Characterized by Spectroscopic Ellipsometry and Raman Spectroscopy
ER  -