@article{847806,
  author = {Nhan Nguyen and James Maslar and Junghyeun Kim and Jin-Ping Han and Jin-Won Park and Deane Chandler-Horowitz and Eric Vogel},
  title = {Crystalline Quality of Bonded Silicon-On-Insulator Characterized by Spectroscopic Ellipsometry and Raman Spectroscopy},
  year = {2004},
  number = {85},
  month = {2004-10-04 00:10:00},
  publisher = {Applied Physics Letters},
  language = {en},
}