Kline, R.
, Sunday, D.
, Wang, C.
, Wu, W.
, Settens, C.
, Benjamin, B.
, Thiel, B.
and Richard, M.
(2013),
Critical Dimension small angel X-ray scattering measurements of FinFET and 3D memory structures, SPIE, San Jose, CA
(Accessed February 7, 2025)