@conference{23161,
  author = {Regis Kline and Daniel Sunday and Chengqing Wang and Wen-Li Wu and Charlie Settens and Bunday Benjamin and Brad Thiel and Matyi Richard},
  title = {Critical Dimension small angel X-ray scattering measurements of FinFET and 3D memory structures},
  year = {2013},
  month = {2013-04-08},
  publisher = {SPIE, San Jose, CA},
  language = {en},
}