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PUBLICATIONS

Control of Interface Nanoscale Structure Created by Plasma-Enhanced Chemical Vapor Deposition

Published

Author(s)

Someswara R. Peri, Bulent Akgun, Sushil K. Satija, Hao Jiang, Jesse Enlow, Timothy J. Bunning, Mark D. Foster
Citation
ACS Applied Materials and Interfaces
Volume
3
Pub Type
Journals

Download Paper

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Keywords

PECVD, feed position, plasma power, interface structure, neutron reflectivity

Citation

Peri, S. , Akgun, B. , Satija, S. , Jiang, H. , Enlow, J. , Bunning, T. and Foster, M. (2011), Control of Interface Nanoscale Structure Created by Plasma-Enhanced Chemical Vapor Deposition, ACS Applied Materials and Interfaces, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905520 (Accessed December 5, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created August 28, 2011, Updated October 12, 2021