@article{788441,
  author = {Someswara Peri and Bulent Akgun and Sushil Satija and Hao Jiang and Jesse Enlow and Timothy Bunning and Mark Foster},
  title = {Control of Interface Nanoscale Structure Created by Plasma-Enhanced Chemical Vapor Deposition},
  year = {2011},
  number = {3},
  month = {2011-08-29 00:08:00},
  publisher = {ACS Applied Materials and Interfaces},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905520},
  language = {en},
}