We studied the contact properties of different metals to flexible optically-transparent single-walled carbon nanotube (SWCNTs) films. The SWCNT films are deposited on flexible polyethylene terephthalate (PET) substrate and patterned in test structures optimized for contact resistance measurements for a particular metal contact. Specific contact resistance and current transfer length is determined for Pt, Cr, Cu and Au contacts. We also evaluate effects of chemical doping and thickness of SWCNT films on the contact resistance.
Citation: Applied Physics Letters
Pub Type: Journals
Contact resistance, carbon nanotube films, flexible