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Constant Shape Factor Frequency Modulated Charge Pumping (FMCP)

Published

Author(s)

Jason T. Ryan, Jason P. Campbell, Jibin Zou, Kin P. Cheung, Richard Southwick, Anthony Oates, Rue Huang

Abstract

Abstract— We examine the seemingly frequency-dependent gate leakage current component of frequency-modulated charge pumping and show it to be a measurement artifact. If untreated, this results in erroneous defect density extractions. We present a constant shape factor methodology to suppress this component such that frequency-modulated charge pumping is well positioned for advanced device defect characterization.
Proceedings Title
IEEE International Integrated Reliability Workshop Final Report
Conference Dates
October 14-18, 2013
Conference Location
South Lake Tahoe, CA
Conference Title
IEEE International Integrated Reliability Workshop

Citation

Ryan, J. , Campbell, J. , Zou, J. , Cheung, K. , Southwick, R. , Oates, A. and Huang, R. (2014), Constant Shape Factor Frequency Modulated Charge Pumping (FMCP), IEEE International Integrated Reliability Workshop Final Report, South Lake Tahoe, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915082 (Accessed June 19, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created March 3, 2014, Updated February 19, 2017