Mattis, R.
, Till, L.
and Frisch, R.
(1982),
A computer program for analysis of data from microelectronic test structures:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.82-2492
(Accessed December 11, 2024)
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A computer program for analysis of data from microelectronic test structures:
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- NBS IR 82-2492
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NBS IR 82-2492
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NIST Pubs
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Created January 1, 1982, Updated May 19, 2023