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A computer program for analysis of data from microelectronic test structures:

Published

Author(s)

R L Mattis, L J Till, R C Frisch
Citation
- NBS IR 82-2492
Report Number
NBS IR 82-2492

Citation

Mattis, R. , Till, L. and Frisch, R. (1982), A computer program for analysis of data from microelectronic test structures:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.82-2492 (Accessed April 20, 2024)
Created January 1, 1982, Updated May 19, 2023