TY  - GEN
AU  - R L Mattis
AU  - L J Till
AU  - R C Frisch
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1982-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.IR.82-2492
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1982
TI  - A computer program for analysis of data from microelectronic test structures:
ER  -