@misc{1179896,
  author = {R L Mattis and L J Till and R C Frisch},
  title = {A computer program for analysis of data from microelectronic test structures:},
  year = {1982},
  month = {1982-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.82-2492},
  language = {en},
}