Woodward, J.
, Fedynyshyn, T.
, Astolfi, D.
, Cann, S.
, Roberts, J.
and Leeson, M.
(2007),
-Component Segregation in Model Chemically Amplified Resists,-, Proc SPIE
(Accessed May 29, 2023)
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-Component Segregation in Model Chemically Amplified Resists,-
Published
Author(s)
, T H. Fedynyshyn, D K. Astolfi, Susan Cann, , M K. Leeson
Citation
Proc SPIE
Volume
6519
Pub Type
Journals
Citation
Created January 1, 2007, Updated February 17, 2017