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PUBLICATIONS

-Component Segregation in Model Chemically Amplified Resists,-

Published

Author(s)

John T. Woodward IV, T H. Fedynyshyn, D K. Astolfi, Susan Cann, J R. Roberts, M K. Leeson
Citation
Proc SPIE
Volume
6519
Pub Type
Journals

Citation

Woodward, J. , Fedynyshyn, T. , Astolfi, D. , Cann, S. , Roberts, J. and Leeson, M. (2007), -Component Segregation in Model Chemically Amplified Resists,-, Proc SPIE (Accessed May 1, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2007, Updated February 17, 2017