@article{126576,
  author = {John Woodward and T Fedynyshyn and D Astolfi and Susan Cann and J Roberts and M Leeson},
  title = {-Component Segregation in Model Chemically Amplified Resists,-},
  year = {2007},
  number = {6519},
  month = {2007-01-01},
  publisher = {Proc SPIE},
  language = {en},
}