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Comparison of High-Resistivity Measurements of Silicon by AC Impedance, DC Resistance, van der Pauw, and Four-Probe Methods, Extended Abstract

Published

Author(s)

W. R. Thurber, James R. Ehrstein, J R. Lowney
Proceedings Title
Extended Abstracts of the Electrochemical Society
Volume
90no2
Conference Dates
October 14-19, 1990
Conference Location
Seattle, WA, USA

Citation

Thurber, W. , Ehrstein, J. and Lowney, J. (1990), Comparison of High-Resistivity Measurements of Silicon by AC Impedance, DC Resistance, van der Pauw, and Four-Probe Methods, Extended Abstract, Extended Abstracts of the Electrochemical Society, Seattle, WA, USA (Accessed March 2, 2024)
Created December 30, 1990, Updated October 12, 2021