TY  - CONF
AU  - W. Thurber
AU  - James Ehrstein
AU  - J Lowney
C2  - Extended Abstracts of the Electrochemical Society, Seattle, WA, USA
DA  - 1990-12-31 00:12:00
LA  - en
M1  - 90no2
PB  - Extended Abstracts of the Electrochemical Society, Seattle, WA, USA
PY  - 1990
TI  - Comparison of High-Resistivity Measurements of Silicon by AC Impedance, DC Resistance, van der Pauw, and Four-Probe Methods, Extended Abstract
ER  -