@conference{767556, author = {W. Thurber and James Ehrstein and J Lowney}, title = {Comparison of High-Resistivity Measurements of Silicon by AC Impedance, DC Resistance, van der Pauw, and Four-Probe Methods, Extended Abstract}, year = {1990}, number = {90no2}, month = {1990-12-31 00:12:00}, publisher = {Extended Abstracts of the Electrochemical Society, Seattle, WA, USA}, language = {en}, }