Kopanski, J.
, Marchiando, J.
and Rennex, B.
(2002),
Comparison of Experimental and Theoretical Scanning Capacitance Microscope Signals and Their Impact on the Accuracy of Determined Two-Dimensional Carrier Profiles, Journal of Vacuum Science and Technology B
(Accessed February 9, 2025)
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Comparison of Experimental and Theoretical Scanning Capacitance Microscope Signals and Their Impact on the Accuracy of Determined Two-Dimensional Carrier Profiles
Published
Author(s)
, ,
Citation
Journal of Vacuum Science and Technology B
Volume
20
Issue
5
Pub Type
Journals
Citation
Issues
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Created October 29, 2002, Updated October 12, 2021