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Comparison of Experimental and Theoretical Scanning Capacitance Microscope Signals and Their Impact on the Accuracy of Determined Two-Dimensional Carrier Profiles

Published

Author(s)

Joseph Kopanski, Jay F. Marchiando, Brian G. Rennex
Citation
Journal of Vacuum Science and Technology B
Volume
20
Issue
5

Citation

Kopanski, J. , Marchiando, J. and Rennex, B. (2002), Comparison of Experimental and Theoretical Scanning Capacitance Microscope Signals and Their Impact on the Accuracy of Determined Two-Dimensional Carrier Profiles, Journal of Vacuum Science and Technology B (Accessed February 25, 2024)
Created October 29, 2002, Updated October 12, 2021