TY  - JOUR
AU  - Joseph Kopanski
AU  - Jay Marchiando
AU  - Brian Rennex
C2  - Journal of Vacuum Science and Technology B
DA  - 2002-10-30 00:10:00
LA  - en
M1  - 20
PB  - Journal of Vacuum Science and Technology B
PY  - 2002
TI  - Comparison of Experimental and Theoretical Scanning Capacitance Microscope Signals and Their Impact on the Accuracy of Determined Two-Dimensional Carrier Profiles
ER  -