@article{795206,
  author = {Joseph Kopanski and Jay Marchiando and Brian Rennex},
  title = {Comparison of Experimental and Theoretical Scanning Capacitance Microscope Signals and Their Impact on the Accuracy of Determined Two-Dimensional Carrier Profiles},
  year = {2002},
  number = {20},
  month = {2002-10-30 00:10:00},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}