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A common-path heterodyne interferometer for surface profiling in microelectronic fabrication

Published

Author(s)

E J. Klein, W F. Ramirez, John L. Hall
Citation
Review of Scientific Instruments
Volume
72

Citation

Klein, E. , Ramirez, W. and Hall, J. (2001), A common-path heterodyne interferometer for surface profiling in microelectronic fabrication, Review of Scientific Instruments (Accessed April 24, 2024)
Created December 31, 2000, Updated October 12, 2021