@article{786826,
  author = {E Klein and W Ramirez and John Hall},
  title = {A common-path heterodyne interferometer for surface profiling in microelectronic fabrication},
  year = {2001},
  number = {72},
  month = {2001-01-01 00:01:00},
  publisher = {Review of Scientific Instruments},
  language = {en},
}