TY  - JOUR
AU  - Klein, E
AU  - Ramirez, W
AU  - Hall, John
C2  - Review of Scientific Instruments
DA  - 2001-01-01 00:01:00
LA  - en
M1  - 72
PB  - Review of Scientific Instruments
PY  - 2001
TI  - A common-path heterodyne interferometer for surface profiling in microelectronic fabrication
ER  -