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A Combinatorial Study of Metal Gate/HfO2 MOSCAPS

Published

Author(s)

Martin L. Green, K S. Chang, Ichiro Takeuchi, T Chikyow
Citation
ECS Transactions
Volume
3
Issue
3

Citation

Green, M. , Chang, K. , Takeuchi, I. and Chikyow, T. (2006), A Combinatorial Study of Metal Gate/HfO2 MOSCAPS, ECS Transactions, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854327 (Accessed April 12, 2024)
Created September 1, 2006, Updated February 19, 2017