Green, M.
, Chang, K.
, Takeuchi, I.
and Chikyow, T.
(2006),
A Combinatorial Study of Metal Gate/HfO2 MOSCAPS, ECS Transactions, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854327
(Accessed December 4, 2024)
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A Combinatorial Study of Metal Gate/HfO2 MOSCAPS
Published
Author(s)
, K S. Chang, Ichiro Takeuchi, T Chikyow
Citation
ECS Transactions
Volume
3
Issue
3
Pub Type
Journals
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Citation
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If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created September 1, 2006, Updated February 19, 2017