@article{167261,
  author = {Martin Green and K Chang and Ichiro Takeuchi and T Chikyow},
  title = {A Combinatorial Study of Metal Gate/HfO2 MOSCAPS},
  year = {2006},
  number = {3},
  month = {2006-09-01},
  publisher = {ECS Transactions},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854327},
  language = {en},
}