TY - JOUR AU - Martin Green AU - K Chang AU - Ichiro Takeuchi AU - T Chikyow C2 - ECS Transactions DA - 2006-09-01 LA - en M1 - 3 PB - ECS Transactions PY - 2006 TI - A Combinatorial Study of Metal Gate/HfO2 MOSCAPS UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854327 ER -