Photo Thermal Induced Resonance (PTIR), recently attracted great interest for enabling chemical identification and imaging with nanoscale resolution. In this work, electron beam nano-patterned polymer samples were fabricated directly on 3-dimentional zinc selenide prisms and used to experimentally evaluate the PTIR lateral resolution, sensitivity and linearity. Experiments prove that PTIR can be used for quantitative chemical analysis at the nanoscale for samples up to ~1 µm thick (linearity limit). The analysis of thicker samples provides the first evidence that the previously developed PTIR theory is correct.
Pub Type: Journals
Infrared Spectroscopy, Chemical Imaging, Nanoscale Characterization, AFM, Electron Beam Lithography.