The charge based capacitance measurement (CBCM) technique is highly sensitive to small capacitances and capable integration of onto an AFM tip, thereby reducing stray and wire capacitance to the bare minimum. The CBCM technique has previous been applied to the measurement of metal-to-metal capacitance in back end of the line (BEOL) multi-level metal interconnect processes. Usually, these devices are integrated on the same chip as the devices to be measured, with either a single CBCM per device, or a multiplexer interfacing multiple devices with a single CBCM circuit. The goal of this work is to interface a single CBCM circuit interfaced with an AFM tip, providing a mobile capacitance meter with unparalleled probe placement precision and high accuracy, quantitative capacitance measurement capability.
Conference Dates: March 25-28, 2013
Conference Location: Gaithersburg, MD
Conference Title: 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
Pub Type: Conferences
AFM-based capacitance measurement, CBCM, Charge based capacitance measurement, C-V measurements, Electrical characterization