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Characterizing Surface Roughness of Thin Films By Polarized Light Scattering, ed. by A. Duparr {?} and B. Singh

Published

Author(s)

Thomas A. Germer, M J. Fasolka
Proceedings Title
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
Conference Dates
August 3, 2003
Conference Location
San Diego, CA
Conference Title
Proc. SPIE 5188

Citation

Germer, T. and Fasolka, M. (2003), Characterizing Surface Roughness of Thin Films By Polarized Light Scattering, ed. by A. Duparr {?} and B. Singh, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies , San Diego, CA (Accessed April 21, 2024)
Created January 1, 2003, Updated February 17, 2017