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Characterization of Nanoporous Low-k Thin Films by Small Angle Neutron Scattering Contrast Variation

Published

Author(s)

R C. Hedden, V. J. Lee, Barry J. Bauer
Citation
Langmuir
Volume
20(2)

Keywords

Reflectivity, Electronic Materials, Nanostructured Materials, SANS, Scattering, Thin Films, contrast match, contrast variation, low-k dielectrics, nanoporous thin films, x-ray reflectivity

Citation

Hedden, R. , Lee, V. and Bauer, B. (2004), Characterization of Nanoporous Low-k Thin Films by Small Angle Neutron Scattering Contrast Variation, Langmuir, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853906 (Accessed April 21, 2024)
Created January 1, 2004, Updated February 17, 2017