@article{168421,
  author = {R Hedden and V. Lee and Barry Bauer},
  title = {Characterization of Nanoporous Low-k Thin Films by Small Angle Neutron Scattering Contrast Variation},
  year = {2004},
  number = { 20(2)},
  month = {2004-01-01},
  publisher = {Langmuir},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853906},
  language = {en},
}