TY  - JOUR
AU  - R Hedden
AU  - V. Lee
AU  - Barry Bauer
C2  - Langmuir
DA  - 2004-01-01
LA  - en
M1  -  20(2)
PB  - Langmuir
PY  - 2004
TI  - Characterization of Nanoporous Low-k Thin Films by Small Angle Neutron Scattering Contrast Variation
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853906
ER  -