Characterization of Electrothermal Actuation with Nanometer and Microradian Precision
Craig R. Copeland, Craig D. McGray, Jon C. Geist, Vladimir A. Aksyuk, Samuel M. Stavis
A recently introduced particle-tracking method was used to measure the single motion cycles of an electrothermal actuator with nanometer and microradian precision. Driving the actuator with a low-noise input induced deterministic motion that was perfectly repeatable within measurement uncertainty, even with an imperfect mechanical linkage in the system. Driving the actuator with a high-noise input induced motion fluctuations from which the play in the linkage was estimated, and which indicated its stochastic coupling and decoupling, resulting in a nondeterministic output of the system. This study establishes a novel methodology for characterizing MEMS motion.
18th International Conference on Solid-State Sensors, Actuators and Microsystems
, McGray, C.
, Geist, J.
, Aksyuk, V.
and Stavis, S.
Characterization of Electrothermal Actuation with Nanometer and Microradian Precision, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, AK, [online], https://doi.org/10.1109/TRANSDUCERS.2015.7181042
(Accessed December 3, 2023)