TY  - CONF
AU  - Craig Copeland
AU  - Craig McGray
AU  - Jon Geist
AU  - Vladimir Aksyuk
AU  - Samuel Stavis
C2  - 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, AK
DA  - 2015-06-21
DO  - https://doi.org/10.1109/TRANSDUCERS.2015.7181042
LA  - en
PB  - 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, AK
PY  - 2015
TI  - Characterization of Electrothermal Actuation with Nanometer and Microradian Precision
ER  -