@conference{41,
  author = {Craig Copeland and Craig McGray and Jon Geist and Vladimir Aksyuk and Samuel Stavis},
  title = {Characterization of Electrothermal Actuation with Nanometer and Microradian Precision},
  year = {2015},
  month = {2015-06-21},
  publisher = {18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, AK},
  doi = {https://doi.org/10.1109/TRANSDUCERS.2015.7181042},
  language = {en},
}