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Characterization of Electrically Active Defects in High-k Gate Dielectrics Using Charge Pumping

Published

Author(s)

Eric M. Vogel
Proceedings Title
Proceedings of the NATO Advanced Research Workshop on Defects in Advanced High-k Dielectrics
Conference Dates
July 11-14, 2005
Conference Location
St. Petersburg, RS
Conference Title
NATO Advanced Research Workshop on Defects in Advanced High-k Dielectrics

Citation

Vogel, E. (2005), Characterization of Electrically Active Defects in High-k Gate Dielectrics Using Charge Pumping, Proceedings of the NATO Advanced Research Workshop on Defects in Advanced High-k Dielectrics, St. Petersburg, RS (Accessed May 26, 2024)

Issues

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Created July 14, 2005, Updated January 27, 2020