Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Characterization and Production Metrology of Thin Transistor Gate Dielectric Films

Published

Author(s)

W Chism, Alain C. Diebold, J Canterbury, Curt A. Richter
Citation
Solid State Phenomena
Volume
76-77

Citation

Chism, W. , Diebold, A. , Canterbury, J. and Richter, C. (2001), Characterization and Production Metrology of Thin Transistor Gate Dielectric Films, Solid State Phenomena (Accessed April 17, 2024)
Created February 28, 2001, Updated October 12, 2021