Chism, W.
, Diebold, A.
, Canterbury, J.
and Richter, C.
(2001),
Characterization and Production Metrology of Thin Transistor Gate Dielectric Films, Solid State Phenomena
(Accessed December 19, 2025)
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Characterization and Production Metrology of Thin Transistor Gate Dielectric Films
Published
Author(s)
W Chism, Alain C. Diebold, J Canterbury,
Citation
Solid State Phenomena
Volume
76-77
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created February 28, 2001, Updated October 12, 2021