@article{767501,
  author = {W Chism and Alain Diebold and J Canterbury and Curt Richter},
  title = {Characterization and Production Metrology of Thin Transistor Gate Dielectric Films},
  year = {2001},
  number = {76-77},
  month = {2001-03-01 00:03:00},
  publisher = {Solid State Phenomena},
  language = {en},
}