TY - JOUR AU - W Chism AU - Alain Diebold AU - J Canterbury AU - Curt Richter C2 - Solid State Phenomena DA - 2001-03-01 00:03:00 LA - en M1 - 76-77 PB - Solid State Phenomena PY - 2001 TI - Characterization and Production Metrology of Thin Transistor Gate Dielectric Films ER -