Seiler, D.
, Diebold, A.
, Bullis, W.
, Shaffner, T.
, McDonald, R.
and Walters, E.
(1998),
Characterization and Metrology for ULSI Technology, American Institute of Physics, Melville, NY (Accessed July 11, 2026)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Characterization and Metrology for ULSI Technology
Published
Author(s)
, Alain C. Diebold, W M. Bullis, , R. C. McDonald, E. J. Walters
Citation
Characterization and Metrology for ULSI Technology,
Volume
449
Publisher Info
American Institute of Physics, Melville, NY
Pub Type
Books
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created November 1, 1998, Updated February 17, 2017