TY  - SER
AU  - David Seiler
AU  - Alain Diebold
AU  - W Bullis
AU  - Thomas Shaffner
AU  - R. McDonald
AU  - E. Walters
C2  - American Institute of Physics, Melville, NY
DA  - 1998-11-01
LA  - en
M1  - 449
PB  - American Institute of Physics, Melville, NY
PY  - 1998
TI  - Characterization and Metrology for ULSI Technology
ER  -