@book{48711,
  author = {David Seiler and Alain Diebold and W Bullis and Thomas Shaffner and R. McDonald and E. Walters},
  title = {Characterization and Metrology for ULSI Technology},
  year = {1998},
  number = {449},
  month = {1998-11-01},
  publisher = {American Institute of Physics, Melville, NY},
  language = {en},
}