Dixson, R.
, Fu, J.
, Orji, N.
, Guthrie, W.
, Allen, R.
and Cresswell, M.
(2005),
CD-AFM Reference Metrology at NIST and SEMATECH, Proceedings of SPIE, San Jose, CA, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32108
(Accessed December 13, 2024)
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CD-AFM Reference Metrology at NIST and SEMATECH
Published
Author(s)
, Jing Fu, Ndubuisi G. Orji, , ,
Proceedings Title
Proceedings of SPIE
Volume
5752
Conference Dates
February 27-March 4, 2005
Conference Location
San Jose, CA, USA
Conference Title
Metrology, Inspection, and Process Control for Microlithography XIX
Pub Type
Conferences
Download Paper
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created February 26, 2005, Updated October 12, 2021