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CD-AFM Reference Metrology at NIST and SEMATECH



Ronald G. Dixson, Jing Fu, Ndubuisi G. Orji, William F. Guthrie, Richard A. Allen, Michael W. Cresswell
Proceedings Title
Proceedings of SPIE
Conference Dates
February 27-March 4, 2005
Conference Location
San Jose, CA, USA
Conference Title
Metrology, Inspection, and Process Control for Microlithography XIX


Dixson, R. , Fu, J. , Orji, N. , Guthrie, W. , Allen, R. and Cresswell, M. (2005), CD-AFM Reference Metrology at NIST and SEMATECH, Proceedings of SPIE, San Jose, CA, USA, [online], (Accessed May 27, 2024)


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Created February 26, 2005, Updated October 12, 2021