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CD-AFM Reference Metrology at NIST and SEMATECH

Published

Author(s)

Ronald G. Dixson, Jing Fu, Ndubuisi G. Orji, William F. Guthrie, Richard A. Allen, Michael W. Cresswell
Proceedings Title
Proceedings of SPIE
Volume
5752
Conference Dates
February 27-March 4, 2005
Conference Location
San Jose, CA, USA
Conference Title
Metrology, Inspection, and Process Control for Microlithography XIX

Citation

Dixson, R. , Fu, J. , Orji, N. , Guthrie, W. , Allen, R. and Cresswell, M. (2005), CD-AFM Reference Metrology at NIST and SEMATECH, Proceedings of SPIE, San Jose, CA, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32108 (Accessed May 27, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created February 26, 2005, Updated October 12, 2021