TY  - CONF
AU  - Ronald Dixson
AU  - Jing Fu
AU  - Ndubuisi Orji
AU  - William Guthrie
AU  - Richard Allen
AU  - Michael Cresswell
C2  - Proceedings of SPIE, San Jose, CA, USA
DA  - 2005-02-27 00:02:00
LA  - en
M1  - 5752
PB  - Proceedings of SPIE, San Jose, CA, USA
PY  - 2005
TI  - CD-AFM Reference Metrology at NIST and SEMATECH
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32108
ER  -